Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California

Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California

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RESULTS AND DISCUSSION Via Resistance Calculation According to the wiring diagram shown in Fig. ... The single vias were fabricated in a three layer Pi/metal structure which had been RIEed in the CF4/O2 gas and was believed to have aanbsp;...


Title:Proceedings of the 1992 International Symposium on Microelectronics, October 19-21, 1992, Moscone Center, San Francisco, California
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Publisher:International Society of Hybrid - 1992
ISBN-13:

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